Recently, the POWER-750H, a tandem high-energy hydrogen ion implanter has released stable, qualified ion beams, signaling the device’s successful operation. Independently developed by China Institute of Atomic Energy (CIAE), a subsidiary of China National Nuclear Corporation, the fully domestically made implanter demonstrates China’s mastery over the entire technology, ensuring its self-reliance and security in the high-end equipment industry.
Ion implanters, together with lithography machines, etching equipment, and thin-film deposition tools, are regarded as the essential “four core pieces of equipment” in chip manufacturing. As a significant outcome of the deep integration between nuclear technology and semiconductor industry, the POWER-750H is expected to preserve China’s independence in advanced technology and foster new quality productive forces.
China has long had to rely on the import of this type of implanters due to R&D difficulties and technological barriers. CIAE has solved a series of issues thorough tandem accelerator technology, which rooted in the institute’s decades of physical researches. Any threat of international technological blockades and monopolies are no longer an issue as the nation now has both bedrock theories and design capabilities.
(Executive editor: Yuan Ting)
